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Part No: X18
EPROM 2: RG-700ZF
FAB: 06768-001 This Asyst Technologies 06764-701 Arm Controller Board is used working surplus
Input: 1A 115VAC
Ulvac Technologies Enviro II Dual Chamber Advanced RF Strip System Manual Set Part No: X18Ulvac Technologies Enviro II Dual Chamber Advanced RF Strip System Manual Set Inventory # 20006 Model No: Manual Set Removed from a Ulvac Technologies 200mm Enviro II Dual Chamber Advanced RF Strip System Included Manuals Book 1: Instruction Manual Book 2: Maintenance Manual Book 3: Maintenance Guide Book 4: Vendor Documents Volume 1 3 Book 4: Vendor Documents Volume 2 3 Book 4: Vendor Documents Volume 3 3 Book S: Site Preparation Guide Equipment